320×240 microbolometer uncooled IRFPA development
- 著者名:
Tissot,J.-L. Martin,J.-L. Mottin,E. Vilain,M. Yon,J.-J. Chatard,J.-P. - 掲載資料名:
- Infrared technology and applications XXVI : 30 July - 3 August 2000, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4130
- 発行年:
- 2000
- 開始ページ:
- 473
- 終了ページ:
- 479
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437754 [0819437751]
- 言語:
- 英語
- 請求記号:
- P63600/4130
- 資料種別:
- 国際会議録
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First demonstration of 25 μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR
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Enhanced amorphous silicon technology for 320×240 microbolometer arrays with a pitch of 35μm
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