Nondestructive film thickness measurement using atomic force microscopy at ultrasonic frequencles
- 著者名:
Crozier,K.B. Yaralioglu,G.G. Degertekin,F.L. Adams,J.D. Minne,S.C. Quate,C.F. - 掲載資料名:
- Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4099
- 発行年:
- 2000
- 開始ページ:
- 48
- 終了ページ:
- 58
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437440 [0819437441]
- 言語:
- 英語
- 請求記号:
- P63600/4099
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
In-situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
8
国際会議録
Measurements of Resonance Frequency of Parylene Microspring Arrays Using Atomic Force Microscopy
Materials Research Society |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Society of Automotive Engineers |
SPIE - The International Society for Optical Engineering |
American Chemical Society |