F2 laser ablation of GaN
- 著者名:
Akane,T. Sugioka,K. Nomura,S. Hammura,K. Obata,K. Aoki,N. Toyoda,K. Aoyagi,Y. Midorikawa,K. - 掲載資料名:
- First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4088
- 発行年:
- 2000
- 開始ページ:
- 70
- 終了ページ:
- 72
- 総ページ数:
- 3
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437310 [081943731X]
- 言語:
- 英語
- 請求記号:
- P63600/4088
- 資料種別:
- 国際会議録
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