Preparation and properties of IrO2 thin films grown by dc magnetron reactive sputtering method
- 著者名:
- 掲載資料名:
- Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4086
- 発行年:
- 2000
- 開始ページ:
- 454
- 終了ページ:
- 457
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437297 [0819437298]
- 言語:
- 英語
- 請求記号:
- P63600/4086
- 資料種別:
- 国際会議録
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