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TRANSPORT PHENOMENA IN PLASMA PROCESSING

著者名:
掲載資料名:
Plasma-surface interactions and processing of materials
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
176
発行年:
1990
開始ページ:
135
終了ページ:
146
総ページ数:
12
出版情報:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792305842 [0792305841]
言語:
英語
請求記号:
N11482/176
資料種別:
国際会議録

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