Advanced PENDEOEPITAXY(TM) of GaN and AlxGa1-xN thin films on SiC(0001) and Si(111) substrates via metalorganic chemical vapor deposition
- 著者名:
- 掲載資料名:
- GaN and related alloys - 1999 : symposium held November 28-December 3, 1999, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 595
- 発行年:
- 2000
- 開始ページ:
- W2.4.1
- 出版情報:
- Warrendale, Pa.: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995031 [155899503X]
- 言語:
- 英語
- 請求記号:
- M23500/595
- 資料種別:
- 国際会議録
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5
国際会議録
Pendeo-epitaxial growth GaN on SiC and silicon substrates via metalorganic chemical vapor deposition
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