Reliability of microsystems based on a failure mechanism approach
- 著者名:
Cruzel,S. ( CNES ) Esteve,D. Dilhan,M. Fourniols,J.Y. Pressecq,F. Puig,O. Simonne,J.J. - 掲載資料名:
- MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3880
- 発行年:
- 1999
- 開始ページ:
- 148
- 終了ページ:
- 155
- 出版情報:
- Bellingham, Washington: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434777 [0819434779]
- 言語:
- 英語
- 請求記号:
- P63600/3880
- 資料種別:
- 国際会議録
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