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Furnace oxynitridation in nitric oxide of thin silicon oxide: Atomic transport mechanisms and interfacial microstructure

著者名:
Trimaille, I.
Ganem, J-J.
Gosset, L. G.
Bailly, O.
Rigo, S.
Cantin, J-L.
Bardeleben, H. J. von
さらに 2 件
掲載資料名:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
592
発行年:
2000
開始ページ:
269
出版情報:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995000 [1558995005]
言語:
英語
請求記号:
M23500/592
資料種別:
国際会議録

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