ACTIVATION ENERGY FOR THE C49-TO-C54 PHASE TRANSITION OF POLYCRYSTALLINE TiSi2 FILMS WITH UNDER 30nm THICKNESS

ACTIVATION ENERGY FOR THE C49-TO-C54 PHASE TRANSITION OF POLYCRYSTALLINE TiSi2 FILMS WITH UNDER 30nm THICKNESS

著者名:

掲載資料名:

Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

311

発行年:

1993

開始ページ:

263

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992078 [1558992073]

言語:

英語

請求記号:

M23500/311

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020791
シリーズID:	PA00000011
会議名:	Symposium on phase transformations in thin films-thermodynamics and kinetics
回次:	1993
会議開催地:	San Francisco, CA, USA
会議開催年:	1993.04.13-1993.04.15

類似資料:

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2 国際会議録 Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films on Deep-Sub-Micron Lines Kittl, J. A., Prinslow, D. A., Apte, P. P., Pas, M. F. MRS - Materials Research Society	8 国際会議録 In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing Gignac, L. M., Svilan, V., Clevenger, L. A., Cabral, C., Jr., Lavoie, C. MRS - Materials Research Society
3 国際会議録 Structure, Morphology, and Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films Bocelli, S., Marabelli, F., Iannuzzi, M., Miglio, L., Grimaldi, M. G., LaVia, F. MRS - Materials Research Society	9 国際会議録 The Effect of TiSi2 Film Thickness and Growth on the Point Defect Perturbance in Si Hemer, S.B., Jones, K.S., Gossman, H.-J., Tung, R.T., Poate, J.M., Luftman, H.S. Electrochemical Society
4 国際会議録 Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures Svilan, V., Rodbell, K. P., Clevenger, L. A., Cabral, C., Jr., Roy, R. A., Lavoie, C., Jordan-Sweet, J., Harper, J. M. … MRS - Materials Research Society	10 国際会議録 Direct Formation of C54 Phase on the Basis of C40 TiSi2 and Its Applications in Deep Sub-Micron Technology Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S. Materials Research Society
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