Rapid thermal annealing for electrical activation in the fabrication of GaAs MESFET
- 著者名:
- 掲載資料名:
- III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 300
- 発行年:
- 1993
- 開始ページ:
- 575
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991965 [1558991964]
- 言語:
- 英語
- 請求記号:
- M23500/300
- 資料種別:
- 国際会議録
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5
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RAPID THERMAL ANNEALING OF GaAs FILMS ON (001) Si SUBSTRATE GROWN BY SOLID PHASE EPITAXY TECHNIQUE
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