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Stable Pt/Ge/Au ohmic contact to n-GaAs with a Ta-Si-N barrier

著者名:
掲載資料名:
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
300
発行年:
1993
開始ページ:
255
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558991965 [1558991964]
言語:
英語
請求記号:
M23500/300
資料種別:
国際会議録

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