Low contact resistivity Mn/Au/Ti/Pd/Au P-ohmic contacts for HBTs
- 著者名:
- 掲載資料名:
- III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 300
- 発行年:
- 1993
- 開始ページ:
- 243
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991965 [1558991964]
- 言語:
- 英語
- 請求記号:
- M23500/300
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Shallow and Low-Resistive Ohmic Contacts to p-In0.53Ga0.47As Based on Pd/Au and Pd/Sb Metallizations
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
10
国際会議録
Comparison of Pd/Ge/Ti/Pt and Pd/Si/Ti/Pt Ohmic Contacts to N-Type InGaAs for AlGaAs/GaAs HBTs
Trans Tech Publications |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |