Transient Enhanced Diffusion of Phosphorus and Defect Evolution in P+ Implanted Si
- 著者名:
Li, J. Keys, P. Chen, J. Law, M. E. Jones, K. S. Jasper, C. - 掲載資料名:
- Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 568
- 発行年:
- 1999
- 開始ページ:
- 175
- 出版情報:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994751 [1558994750]
- 言語:
- 英語
- 請求記号:
- M23500/568
- 資料種別:
- 国際会議録
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