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Co-Optimization of Si Thin-Film Deposition and Excimer Laser Anneal Processes for Fabrication of High-Performance p-Si TFTs

著者名:
掲載資料名:
Flat-panel display materials--1998 : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
508
発行年:
1998
開始ページ:
67
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994140 [1558994149]
言語:
英語
請求記号:
M23500/508
資料種別:
国際会議録

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