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Cesium-Enhanced rf Magnetron Deposition of Carbon Nitride and Diamondlike Carbon Films

著者名:
掲載資料名:
Covalently bonded disordered thin-film materials : symposium held December 2-4, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
498
発行年:
1998
開始ページ:
153
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994034 [1558994033]
言語:
英語
請求記号:
M23500/498
資料種別:
国際会議録

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