Dry Etching of GaN Using Reactive Ion-Beam Etching and Chemically Assisted Reactive Ion-Beam Etching
- 著者名:
Lee, Jae-Won Park, Hyong-Soo Park, Yong-Jo Yoo, Myong-Cheol Kim, Tae-Il Kim, Hyeon-Soo Yeom, Geun-Yong - 掲載資料名:
- Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 468
- 発行年:
- 1997
- 開始ページ:
- 373
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993723 [155899372X]
- 言語:
- 英語
- 請求記号:
- M23500/468
- 資料種別:
- 国際会議録
類似資料:
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