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SUPPRESSION OF ION-INDUCED CHARGE COLLECTION BY HIGH-ENERGY B+-IMPLANTED LAYER

著者名:
Kishimoto, T.
Sayama, H.
Takai, M.
Ohno, Y.
Sonoda, K.
Nishimura, T.
Kinomura, A.
Horino, Y.
Fujii, K.
さらに 4 件
掲載資料名:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
354
発行年:
1995
開始ページ:
135
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992559 [1558992553]
言語:
英語
請求記号:
M23500/354
資料種別:
国際会議録

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