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FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)

著者名:
Liu, J. B.
Iyer, S. S. K.
Min, J.
Chu, P.
Gronsky, R.
Hu, C.
Cheung, N. W.
さらに 2 件
掲載資料名:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
354
発行年:
1995
開始ページ:
117
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992559 [1558992553]
言語:
英語
請求記号:
M23500/354
資料種別:
国際会議録

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