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PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD MICRO- AND POLYCRYSTALLINE SILICON FILMS

著者名:
Berre, M. Le
Lemiti, M.
Barbier, D.
Pinard, P.
Cali, J.
Bustarret, E.
Bruyere, J. -C.
Sicart, J.
Robert, J. L.
さらに 4 件
掲載資料名:
Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
343
発行年:
1994
開始ページ:
733
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992436 [155899243X]
言語:
英語
請求記号:
M23500/343
資料種別:
国際会議録

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