PREPARATION OF PZT THIN FILMS BY ECR PECVD

PREPARATION OF PZT THIN FILMS BY ECR PECVD

著者名:

Kim, J. W.

掲載資料名:

Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

343

発行年:

1994

開始ページ:

493

出版情報:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992436 [155899243X]

言語:

英語

請求記号:

M23500/343

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020769
シリーズID:	PA00000011
会議名:	Symposium on polycrystalline thin films
回次:	1994
会議開催地:	San Francisco, CA, USA
会議開催年:	1994.04.04-1994.04.08

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2 国際会議録 Thermal stability of PECVD W-B-N thin film as a diffusion barrier Kim,Y.T., Kim,D.J., Lee,C.W., Park,J.-W. SPIE-The International Society for Optical Engineering	8 国際会議録 MEASURING FATIGUE IN PZT THIN FILMS Johnson, D.J., Amm, D.T., Griswold, E., Sreenivas, K., Yi, G., Sayer, M. Materials Research Society
3 国際会議録 Preparation of Drug Loaded Polyurethane Thin Layer on the Silicone Tube by Electrospinning Technique for Stent Application D.G. Shin, Y.J. Lee, Y. Kim, W.T. Kwon, S.R. Kim Trans Tech Publications	9 国際会議録 Preparation of PZT Thin Films on Pt/Ti/SiO2 and Pt/SiO2 Substrates by ECR Plasma-Enhanced dc Magnetron Multitarget Reactive Sputtering Kim, Sung-Tae, Kim, Hyun-Ho, Lee, Moon-Yong, Lee, Won-Jong MRS - Materials Research Society
4 国際会議録 Low Temperature Fabrication of Polycrystalline Silicon Thin Films by ECR PECVD Jeon, Y.C., Lee, S.W. Electrochemical Society	10 国際会議録 Photochemical selective surface modification using micromirror array for biochip fabrication Lee,K.-N., Shin,D.-S., Chung,W.-J., Lee,Y.-S., Kim,Y.-K. SPIE-The International Society for Optical Engineering
5 国際会議録 Preparation and Characterization of PZT Thin Films on RuOx/Pt Multilayered Electrode by MOCVD Kim, Tae-Young, Kim, Daesig, Chung, Chee Won, Lee, June Key, Song, Inyong MRS - Materials Research Society	11 国際会議録 ACCELERATED DEGRADATION MECHANISMS IN AMORPHOUS SILICON THIN FILM TRANSISTORS . Chung, I.J., Oh, C.H., Kim, W.Y., Hwang, J.Y., Kim, Y.S., Park, J.S., Lee, S.K., Han, M.K. Materials Research Society
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