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Study of resolution improvement of dimension measurement by linear CCD image sensor

著者名:
掲載資料名:
Automated optical inspection for industry : 6-7 November 1996, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2899
発行年:
1996
開始ページ:
186
終了ページ:
191
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819423009 [0819423009]
言語:
英語
請求記号:
P63600/2899
資料種別:
国際会議録

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