Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
- 著者名:
Smith,J.H. ( Sandia National Labs. ) Montague,S. Sniegowski,J.J. Murray,J.R. Manginell,R.P. McWhorter,P.J. Huber,R.J. - 掲載資料名:
- Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2879
- 発行年:
- 1996
- 開始ページ:
- 306
- 終了ページ:
- 314
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422774 [0819422770]
- 言語:
- 英語
- 請求記号:
- P63600/2879
- 資料種別:
- 国際会議録
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