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Surface photovoltage analysis of iron contamination in silicon processing and the relation to gate oxide integrity

著者名:
Henley,W.B. ( Univ.of South Florida )  
掲載資料名:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2638
発行年:
1995
開始ページ:
172
終了ページ:
182
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420046 [0819420042]
言語:
英語
請求記号:
P63600/2638
資料種別:
国際会議録

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