Influence of oxygen-iron interaction on the external gettering of Fe in p-Si by polycrystalline silicon film
- 著者名:
- Mishra,K.K. ( MEMC Electronic Materials,Inc. )
- Stinson,M.
- Lowell,J.K.
- 掲載資料名:
- Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2638
- 発行年:
- 1995
- 開始ページ:
- 121
- 終了ページ:
- 128
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420046 [0819420042]
- 言語:
- 英語
- 請求記号:
- P63600/2638
- 資料種別:
- 国際会議録
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1
国際会議録
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