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Influence of oxygen-iron interaction on the external gettering of Fe in p-Si by polycrystalline silicon film

著者名:
掲載資料名:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2638
発行年:
1995
開始ページ:
121
終了ページ:
128
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420046 [0819420042]
言語:
英語
請求記号:
P63600/2638
資料種別:
国際会議録

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