Blank Cover Image

Evaluation of contaminant-induced charge from oxide chemical-mechanical polish

著者名:
掲載資料名:
Optical Characterization Techniques for High-P6rfo「nwic6 Microelectronic Device Manufacturing II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2638
発行年:
1995
開始ページ:
27
終了ページ:
37
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420046 [0819420042]
言語:
英語
請求記号:
P63600/2638
資料種別:
国際会議録

類似資料:

Lowell,J.K., Ackmann,P.W., Brown,S.E., Sherry,J., Hossain,T.

SPIE-The International Society for Optical Engineering

Suphantharida, P., Osaco-Asare, K.

Electrochemical Society

Stuber,A., Lowell,J.K.

SPIE-The International Society for Optical Engineering

Teo, T.Y., Goh, W.L., Leong, L.S., Lim, V.S.K., Tse, T.Y., Chan, L.

SPIE-The International Society for Optical Engineering

Riley, C., Filson, J., Mendicino, L., Brown, P.T.

Electrochemical Society

Yang, K., Gutmann, R. J., Murarka, S. P., Stonebaker, E., Atkins, H.

MRS - Materials Research Society

P. Edelman, A.M. Hoff, L. Jastrzebski, J. Lagowski

Society of Photo-optical Instrumentation Engineers

Jastrzebski, L., Henley, W., DeBusk, D., Haddad, N., Lowell, J., Wenner, V., Nauka, K., Persson, E.

Electrochemical Society

Wilson, M., Lagowski, J., Savtchou, A., Marinskiy, D., Jastrzebski, L., D'Amico, J.

MRS-Materials Research Society

Basim, G.B., Adler, J.J., Mahajan, U., Singh, R.K., Moudgil, B.M.

Electrochemical Society

Lee, J.M., Cho, S.H., Park, J.G., Lee, S.H., Han, Y.P., Kim, S.Y.

SPIE-The International Society for Optical Engineering

Yoon, B.U., Jeong, I.K, Kim, J.Y., Lee, J.W., Hah, S.R., Moon, J.T., Lee, S.I.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12