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Effects of Al-C Ion-Implantation and Annealing in Epitaxial 6H-SiC Studied by Structural and Optical Techniques

著者名:
Feng,Z.C.
Ferguson,I.
Stall,R.A.
Li,K.
Shi,Y.
Singh,H.
Tone,K.
Zhao,J.H.
Wee,A.T.S.
Tan,K.L.
Adar,F.
Lenain,B.
さらに 7 件
掲載資料名:
Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997
シリーズ名:
Materials science forum
シリーズ巻号:
264-268
発行年:
1998
巻:
Part2
開始ページ:
693
終了ページ:
696
出版情報:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497928 [0878497927]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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