Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

著者名:

掲載資料名:

Hydrogen in compound semiconductors

シリーズ名:

Materials science forum

シリーズ巻号:

148-149

発行年:

1994

開始ページ:

189

終了ページ:

218

出版情報:

Zurich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496723 [0878496726]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020688
シリーズID:	PA00000012

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2 国際会議録 As-IMPLANTED AND ANNEALING BEHAVIOR OF H AND Be IMPLANTS IN InP AND COMPARISON WITH GaAs Zavada, J. M., Wilson, R. G., Novak, S. W. Materials Research Society	8 国際会議録 Luminescence of Erbium Atoms in III-V Compound Semiconductors Zavada, J.M., Zhang, D. Electrochemical Society
3 国際会議録 Deuterium Introduction Into 6H and 3C-SiC Crystals and Thermal Stability with Annealing Zavada, J.M., Wilson, R.G., Pearton, S.J., Lee, B.K., Steckl, A.J. Electrochemical Society	9 国際会議録 HYDROGEN INCORPORATION AND CARRIER REDUCTION IN HYDROGENATED n-GaAs:Si AND p-GaAs:Zn CRYSTALS Zavada, J. M., Wilson, R. G., Jenkinson, H. A. Materials Research Society
4 国際会議録 BEHAVIOUR OF IMPLANTED HYDROGEN IN GALLIUM PHOSPHIDE SINGLE CRYSTALS Zavada, J. M., Wilson, R,. G., Novak, S. W., Pearton, S. J., Neida, Von A. R. Materials Research Society	10 国際会議録 Rare Earth Doping of III-V Nitride Semiconductors Zavada, J.M. Electrochemical Society
5 国際会議録 Evaluation of Erbium Doped III-Nitride Semiconductors for Optoelectronic Applications Hoemmerich, U., Thaik, M., Zavada, J.M., Schwartz, R.N., Wilson, R.G., Pearton, S.J., Abernathy, C.R., MacKenzie, J.D. Electrochemical Society	11 国際会議録 Novel in-situ ion bombardment process for a thermally stable (>800 C) plasma deposited dielectric Ren, F., Lothian, J.R., Pearton, S.J., Wilson, R.G., LaRoche, J.R., Lee, J.W., Johnson, D., Zavada, J.M. Materials Research Society
6 国際会議録 Implantation and Annealing of Wide Bandgap Materials Wilson, R.G. Electrochemical Society	12 国際会議録 DIFFUSION OF IMPLANTED DOPANTS AND ISOLATION SPECIES IN III-V NITRIDES Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Wilson, R. G., Zavada, J. M. MRS - Materials Research Society

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