EFFECTS OF 450。?THERMAL ANNEALING UPON OXYGEN PRECIPITATION IN B-DOPED CZ Si WAFERS.
- 著者名:
HAHN,S. SHATAS,S. STEIN,H.J. ARST,M. SADANA,D.K. REK,Z.U. STOJANOFF,V. - 掲載資料名:
- Defects in Semiconductors : Proceedings of the 14th International Conference on Defects in Semiconductors, ICDS-14, Paris, France, August 18-22, 1986
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 10-12
- 発行年:
- 1986
- 巻:
- Part3
- 開始ページ:
- 975
- 終了ページ:
- 978
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878495511 [0878495517]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
4
国際会議録
FORMATION OF A LOW THERMAL DONORS CONCENTRATION LAYEER IN Cz Si WAFER DURING 450 C/64hr ANNEALING
Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications |
Electrochemical Society |