Roughness parameters and surface deformation measured by "Coherence Radar"
- 著者名:
- Ettl, P. ( University of Erlangen, Germany )
- Schmidt, B.
- Schenk, M.
- Laszlo, I.
- Hausler, G.
- 掲載資料名:
- International Conference on Applied Optical Metrology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3407
- 発行年:
- 1998
- 開始ページ:
- 133
- 終了ページ:
- 140
- 出版情報:
- Bellingham, Wash.: SPIE--International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428592 [0819428590]
- 言語:
- 英語
- 請求記号:
- P63600/3407
- 資料種別:
- 国際会議録
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