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Synthesis of high-quality Si1-yCy and Si1-x-yGexCy epitaxial layers on (100)Si by ion implantation and pulsed excimer laser crystallization

著者名:
Grob,J.-J. ( Lab.PHASE/CNRS (France) )
Fogarassy,E. ( Lab.PHASE/CNRS (France) )
Grob,A. ( Lab.PHASE/CNRS (France) )
Muller,D. ( Lab.PHASE/CNRS (France) )
Prevot,B. ( Lab.PHASE/CNRS (France) )
Stuck,R. ( Lab.PHASE/CNRS (France) )
de Unamuno,S. ( Lab.PHASE/CNRS (France) )
Boher,P. ( SOPRA SA (France) )
Stehle,M.X. ( SOPRA SA (France) )
さらに 4 件
掲載資料名:
ALT '97, International Conference on Laser Surface Processing : 8-12 September 1997, Limoges, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3404
発行年:
1998
開始ページ:
47
終了ページ:
56
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428554 [0819428558]
言語:
英語
請求記号:
P63600/3404
資料種別:
国際会議録

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