Synthesis of high-quality Si1-yCy and Si1-x-yGexCy epitaxial layers on (100)Si by ion implantation and pulsed excimer laser crystallization
- 著者名:
Grob,J.-J. ( Lab.PHASE/CNRS (France) ) Fogarassy,E. ( Lab.PHASE/CNRS (France) ) Grob,A. ( Lab.PHASE/CNRS (France) ) Muller,D. ( Lab.PHASE/CNRS (France) ) Prevot,B. ( Lab.PHASE/CNRS (France) ) Stuck,R. ( Lab.PHASE/CNRS (France) ) de Unamuno,S. ( Lab.PHASE/CNRS (France) ) Boher,P. ( SOPRA SA (France) ) Stehle,M.X. ( SOPRA SA (France) ) - 掲載資料名:
- ALT '97, International Conference on Laser Surface Processing : 8-12 September 1997, Limoges, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3404
- 発行年:
- 1998
- 開始ページ:
- 47
- 終了ページ:
- 56
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428554 [0819428558]
- 言語:
- 英語
- 請求記号:
- P63600/3404
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
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SPIE-The International Society for Optical Engineering |
10
国際会議録
Pulsed Excimer Laser Crystallization and Doping for the Fabrication of Poly-Si and SiGe TFTs
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