Micromirror actuation with electrostatic force and plate bending

Micromirror actuation with electrostatic force and plate bending

著者名:

Han,S. ( Korea Univ. )
Park,H.
Pak,J.

掲載資料名:

Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3899

発行年:

1999

開始ページ:

117

終了ページ:

123

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435019 [0819435015]

言語:

英語

請求記号:

P63600/3899

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020417
シリーズID:	PA00000029
会議名:	International Symposium on Photonics and Applications : Photonic Technology into the 21st Century
回次:	1999
会議開催地:	Singapore
会議開催年:	1999.12.01-1999.12.03

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