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Real-time two-color variable-resolution video moire and error map moire using a Mach-Zehnder interferometer

著者名:
掲載資料名:
Three-dimensional imaging, optical metrology, and inspection V : 19-20 September 1999, Boston, Massachusetts
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3835
発行年:
1999
開始ページ:
177
終了ページ:
183
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434289 [0819434280]
言語:
英語
請求記号:
P63600/3835
資料種別:
国際会議録

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