Blank Cover Image

Investigation of the deposition and integration of hard coatings for moving MEMS applications

著者名:
掲載資料名:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
605
発行年:
2000
開始ページ:
123
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995130 [1558995137]
言語:
英語
請求記号:
M23500/605
資料種別:
国際会議録

類似資料:

Radhakrishnan, G., Adams, P.M., Robertson, R.E., Cole, R. C.

SPIE-The International Society for Optical Engineering

J.-D. Kamminga, R. Hoy, P. van Essen, D. Doerwald, M. Schreurs, G.C.A.M. Janssen

Society of Vacuum Coaters

Radhakrishnan, G., Robertson, R. E., Adams, P. M., Osofsky, S. S., MacGowan, K. S.

Materials Research Society

Zlatanovic,M.D., Kunosic,A.M., Belosevac,R.B., Popovic,N.V.

Trans Tech Publications

Radhakrishnan,G., Adams,P.M., Speckman,D.M.

SPIE - The International Society for Optical Engineering

Kim,J., Bolle,C.A., Boie,R.A., Gates,J.V., Ramirez,A.G., Jin,S., Bishop,D.J.

SPIE - The International Society for Optical Engineering

Demaree, J. D., Fountzoulas, C. G., Hirvonen, J. K., Monserrat, M. E., Halada, G. P., Clayton, C. R.

MRS - Materials Research Society

Myung, N.V., Park, D.Y., Schwartz, M., Nobe, K., Yang, H., Yang, C.-K., Judy, J.W.

Electrochemical Society

Adams, S.G., Kudrle, T.D., MacDonald, N.C., Neves, H.P., Chen, J-M., Lopatin, S., Maharbiz, M.

Materials Research Society

M.M. David, D.G. O'Neill, D.J. McClure, B.J. Gates, C.B. Shay, M.C. Gifford, J.D. Heininger, S.R Maki

Society of Vacuum Coaters

Cole,C., Jones,P.S., Gibson,D.R.

SPIE-The International Society for Optical Engineering

Somasundram, K., McCann, P., Cole, D., McNamara, C., Boyle, A., Devine, C., Brown, A., Nevin, A.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12