ELECTRICAL PROPERTIES OF COPPER SILICIDE/SILICON INTERFACES
- 著者名:
- Svensson, B. G.
- 掲載資料名:
- Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 320
- 発行年:
- 1994
- 開始ページ:
- 281
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992191 [1558992197]
- 言語:
- 英語
- 請求記号:
- M23500/320
- 資料種別:
- 国際会議録
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12
国際会議録
Effect of Cobalt and Copper Contamination on the Electrical Properties of Processed Silicon
Electrochemical Society, SPIE-The International Society for Optical Engineering |