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ELECTRICAL PROPERTIES OF SOL-GEL PZT THIN FILMS FOR DECOUPLING CAPACITOR APPLICATIONS

著者名:
掲載資料名:
Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
310
発行年:
1992
開始ページ:
59
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992061 [1558992065]
言語:
英語
請求記号:
M23500/310
資料種別:
国際会議録

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