Silicon Surface Chemistry by IR Spectroscopy in the Mid- to Far-IR Region: H2O and Ethanol on Si(100)
- 著者名:
Struck, L. M. Eng, J., Jr. Bent, B. E. Chabal, Y. J. Williams, G. P. White, A. E. Christman, S. Chaban, E. E. Raghavachari, K. Flynn, G. W. Radermacher, K. Mantl, S. - 掲載資料名:
- Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 386
- 発行年:
- 1995
- 開始ページ:
- 395
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992894 [1558992898]
- 言語:
- 英語
- 請求記号:
- M23500/386
- 資料種別:
- 国際会議録
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