Inductively-Coupled Plasma Etching of NiFe and NiFeCo

Inductively-Coupled Plasma Etching of NiFe and NiFeCo

著者名:

Jung, K. B.

掲載資料名:

High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

517

発行年:

1998

開始ページ:

79

出版情報:

Warrendale, Penn: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994232 [1558994238]

言語:

英語

請求記号:

M23500/517

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020314
シリーズID:	PA00000011
会議名:	Symposium on high-density magnetic recording and integrated magneto-optics
回次:	1998
会議開催地:	San Francisco, CA, USA
会議開催年:	1998.04.12-1998.04.16

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