Enhanced Crystallinity of Microcrystalline Silicon Thin Films Using Deuterium in Reactive Magnetron Sputter Deposition at 230。?C
- 著者名:
- 掲載資料名:
- Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 507
- 発行年:
- 1999
- 開始ページ:
- 429
- 出版情報:
- Warrendale: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994133 [1558994130]
- 言語:
- 英語
- 請求記号:
- M23500/507
- 資料種別:
- 国際会議録
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