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Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity

著者名:
Imafuku, D.
Mizubayashi, W.
Miyazaki, S.
Hirose, M.
Wakayama, Y.
Kobayashi, S.
さらに 1 件
掲載資料名:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
477
発行年:
1997
開始ページ:
101
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993815 [1558993819]
言語:
英語
請求記号:
M23500/477
資料種別:
国際会議録

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