Blank Cover Image

Effect of Cl in Gate Oxidation

著者名:
Mertens, P. W.
McGeary, M. J.
Schaekers, M.
Sprey, H.
Vermeire, B.
Depas, M.
Meuris, M.
Heyns, M. M.
さらに 3 件
掲載資料名:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
477
発行年:
1997
開始ページ:
89
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993815 [1558993819]
言語:
英語
請求記号:
M23500/477
資料種別:
国際会議録

類似資料:

1 国際会議録 Effect of Cl in Gate Oxidation

Mertens, P. W., McGeary, M. J., Schaekers, M., Sprey, H., Vermeire, B., Depas, M., Meuris, M., Heyns, M. M.

MRS - Materials Research Society

Houssa, M., Mertens, P. W., Heyns, M. M.

MRS - Materials Research Society

McGeary, M. J., Martens, P. W., Vermeire, B., Heyns, M., Sprey, H., Lubbers, A., Schaekers, M.

MRS - Materials Research Society

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society

Depas, M., Heyns, M.M., Nigam, T., Kenis, K., Sprey, H., Wilhelm, R., Crossley, A., Sofield, C.J., Graef, D.

Electrochemical Society

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society

Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., …

Electrochemical Society

Verhaverbeke, S., Meuris, M., Schmidt, H., Mertens, P., Heyns, M.

Electrochemical Society

Bearda, T.R., Vanhellemont, J., Mertens, P.W., Heyns, M.

Electrochemical Society

Verhaverbeke, S., Bender, H., Meuris, M., Mertens, P. W., Schmidt, H. F., Heyns, M. M.

MRS - Materials Research Society

Verhaverbeke, S., Alay, J., Mertens, P., Meuris, M., Heyns, M., Vandervorst, W., Murrell, M., Sofield, C.

Materials Research Society

Jean, J., Vermeire, B., Parks, H., Raghavan, S., Ogle, B.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12