Low Temperature Growth of Nanocrystalline Silicon from SiF4 + SiH4
- 著者名:
- 掲載資料名:
- Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 424
- 発行年:
- 1997
- 開始ページ:
- 103
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993273 [1558993274]
- 言語:
- 英語
- 請求記号:
- M23500/424
- 資料種別:
- 国際会議録
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9
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Effects of Growth Parameters on the Performance of μc-Si Thin Film Transistors Deposited Using SiF4
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