Diffusion Barrier Property of Sputtered Molybdenum Nitride Films for Dram Copper Metallization
- 著者名:
- 掲載資料名:
- Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 403
- 発行年:
- 1996
- 開始ページ:
- 687
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993068 [1558993061]
- 言語:
- 英語
- 請求記号:
- M23500/403
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
CHARACTERIZATION OF TANTALUM OXIDE THIN FILM AND ITS ELECTRODES FOR DRAM's CAPACITOR APPLICATION
MRS - Materials Research Society |
7
国際会議録
Effects of Nitrogen on Preventing the Crystallization of Amorphous Ta-Si-N Diffusion Barrier
MRS - Materials Research Society |
Materials Research Society |
Trans Tech Publications |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
6
国際会議録
Effects of Nitrogen on Preventing the Crystallization of Amorphous Ta-Si-N Diffusion Barrier
MRS - Materials Research Society |
Materials Research Society |