Electric and Optical Properties of ｦﾌc-Si,Ge:H Alloys Deposited by Reactive Magnetron Sputtering (RMS)

Electric and Optical Properties of ｦﾌc-Si,Ge:H Alloys Deposited by Reactive Magnetron Sputtering (RMS)

著者名:

掲載資料名:

Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

403

発行年:

1996

開始ページ:

471

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993068 [1558993061]

言語:

英語

請求記号:

M23500/403

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020303
シリーズID:	PA00000011
会議名:	Symposium on polycrystalline thin films
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.12.01

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1 国際会議録 Substrate Surface Dependence of the Microstructure of ｦﾌc-Si,Ge:H Deposited by Reactive Magnetron Sputtering (RMS) Cho, S. M., Christensen, K., Wolfe, D., Ying, H., Lee, D. R., Lucovsky, G., Maher, D. M. MRS - Materials Research Society	7 国際会議録 Optical properties and laser damage of thin films deposited by reactive rf-magnetron sputtering Yoshida,K., Tochio,N., Ohya,M., Ochi,K., Kaku,S., Kamimura,T., Yoshida,H. SPIE - The International Society for Optical Engineering
2 国際会議録 DEPOSITION OF MICROCRYSTALLINE Si,Ge (ｦﾌc-Si,Ge) ALLOYS BY REACTIVE MAGNETRON SPUTTERING Cho, S. M., Wolfe, D., He, S. S., Christensen, K., Maher, D. M., Lucovsky, G. MRS - Materials Research Society	8 国際会議録 Deposition of Multilayer Optical Films and Rugate Filters Deposited by Reactive Magnetron Sputtering M. Vergöhl, C. Rickers, U. Kricheldorf, K. Schiffmann, P. Giesel, R. Dittrich, U. Richter Society of Vacuum Coaters
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