Fabrication of Polycrystalline Silicon on Glass from Fluorinated Precursors with the Aid of Atomic Hydrogen

Fabrication of Polycrystalline Silicon on Glass from Fluorinated Precursors with the Aid of Atomic Hydrogen

著者名:

掲載資料名:

Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

403

発行年:

1996

開始ページ:

391

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993068 [1558993061]

言語:

英語

請求記号:

M23500/403

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020303
シリーズID:	PA00000011
会議名:	Symposium on polycrystalline thin films
回次:	2nd
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.12.01

類似資料:

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2 国際会議録 IN SITU ELLIPSOMETRIC OBSERVATION OF THE GROWTH OF CRYSTALLINE SILICON FROM FLUORINATED PRECURSORS Akasaka, T., Araki, Y., Shimizu, I. Materials Research Society	8 国際会議録 Fabrication of Mg₂Si from a Reused-silicon Source and its Thermoelectric Characteristics Masayasu Akasaka, Tsutomu Iida, Youhiko Mito, Takeru Omori, Yohei Oguni, Shigeki Yokoyama, Keishi Nishio, Yoshifumi … Materials Research Society
3 国際会議録 CONTROL OF GRAIN SIZE AND TEXTURE OF POLY-Si WITH ATOMIC HYDROGEN UNDER IN SITU ELLIPSOMETRIC OBSERVATION Nakamura, K., Akasaka, T., He, D., Shimizu, I. MRS - Materials Research Society	9 国際会議録 Fabrication and Characteriztion of Polycrystalline Silicon Thin Films by Reactive Thermal CVD with Si_2H_6 and F_2 Lee, J.W., Shimizu, K., Hanna, J. Materials Research Society
4 国際会議録 High Rates and Very Low Temperature Fabrication of Polycrystalline Silicon From Fluorinated Source Gas and Their Transport Properties Fortmann, C. M., Kamiya, T., Nakahata, K., Ro, K., Shimizu, I. Materials Research Society	10 国際会議録 Transport Properties Of Polycrystalline Silicon With Various Textures And Microstructures Fortmann, C. M., Kamiya, T., Nakahata, K., Ro, K., Shimizu, I., Suemasu, A. Materials Research Society
5 国際会議録 Epitaxylike Growth of Polycrystalline Silicon on the Seed Crystallites Grown on Glass Miyamoto, Y., Miida, A., Shimizu, I. MRS - Materials Research Society	11 国際会議録 29Si NMR AND XPS INVESTIGATION OF THE STRUCTURE OF SILICON OXYCARBIDE GLASSED DERIVED FROM POLYSILOXANE PRECURSORS Corriu, R. J. P., Leclercq, D., Mutin, P. H., Vioux, A. MRS - Materials Research Society
6 国際会議録 Crystal Growth of Laser Annealed Polycrystalline Silicon as a Function of Hydrogen Content of Precursors Tamura, Takuo, Ogata, Kiyoshi, Takahashi, Michiko, Suzuki, Kenkichi, Yamaguchi, Hironaru, Todoroki, Satoru Materials Research Society	12 国際会議録 Smart dielectrics of fluorinated silicon glass prepared by liquid phase deposition method Yeh, C.-F., Chen, T.-F., Lee, Y.-C., Liu, C.-H., Lin, S.-S. SPIE-The International Society for Optical Engineering

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