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New ESCAP-type resist with enhanced etch resistance and its application to future DRAM and logic devices

著者名:
Conley,W. ( IBM Microelectronics Div. )
Brunsvold,W.R.
Buehrer,F.
Dellaguardia,R.
Dobuzinsky,D.
Farrell,T.R.
Ho,H.
Katnani,A.D.
Keller,R.
Marsh,J.
Muller,P.
Nunes,R.
Ng,H.Y.
Oberschmidt,J.M.
Ryan,D.
Cotler-Wagner,T.
Schulz,R.
Ito,H.
Hofer,D.C.
さらに 14 件
掲載資料名:
Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3049
発行年:
1997
開始ページ:
282
終了ページ:
299
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424631 [0819424633]
言語:
英語
請求記号:
P63600/3049
資料種別:
国際会議録

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