Optical Properties of SiOxNy Thin Films Prepared by Ion Beam Assisted Deposition,
- 著者名:
- 掲載資料名:
- Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2778
- 発行年:
- 1996
- 巻:
- Part1
- 開始ページ:
- 209
- 終了ページ:
- 210
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421647 [0819421642]
- 言語:
- 英語
- 請求記号:
- P63600/2778
- 資料種別:
- 国際会議録
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