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Influence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc Methods

著者名:
掲載資料名:
Trends and new applications of thin films : proceedings of the 6th International Symposium on Trends and New Applications of Thin Films (TATF '98), Regensburg, Germany, March 1998
シリーズ名:
Materials science forum
シリーズ巻号:
287-288
発行年:
1998
開始ページ:
381
終了ページ:
382
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498154 [087849815X]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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