Oxygen Clusters in as-grown Cz-Si Crystals Probed by Positron Annihilation
- 著者名:
Ikari,A. Kawakami,K. Haga,H. Uedono,A. Wei,L. Kawano,T. Tanigawa,S. - 掲載資料名:
- Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 143-147
- 発行年:
- 1994
- 巻:
- Pt.3
- 開始ページ:
- 1583
- 終了ページ:
- 1588
- 出版情報:
- Zurich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878496716 [0878496718]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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12
国際会議録
Monoenergetic Positron Beam Studies of Near Surface Defects Induced by Low Dose Be-Implantation
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