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Interferometric translation-rotation encoder using diffraction gratings

著者名:
掲載資料名:
Theory and practice of surface-relief diffraction gratings : synchrotron and other applications : 20 July 1998, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3450
発行年:
1998
開始ページ:
46
終了ページ:
54
出版情報:
Bellingham, Wash., USA: SPIE
ISSN:
0277786X
ISBN:
9780819429056 [0819429058]
言語:
英語
請求記号:
P63600/3450
資料種別:
国際会議録

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