Interferometric translation-rotation encoder using diffraction gratings
- 著者名:
- Neviere, M. ( Laboratoire d'Optique Electromagnetique, France )
- Popov, E.
- Bojhkov, B.
- Tsonev, L.
- Tonchev, S.
- 掲載資料名:
- Theory and practice of surface-relief diffraction gratings : synchrotron and other applications : 20 July 1998, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3450
- 発行年:
- 1998
- 開始ページ:
- 46
- 終了ページ:
- 54
- 出版情報:
- Bellingham, Wash., USA: SPIE
- ISSN:
- 0277786X
- ISBN:
- 9780819429056 [0819429058]
- 言語:
- 英語
- 請求記号:
- P63600/3450
- 資料種別:
- 国際会議録
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